The Center for Sensors and Devices is dedicated to research and development in the field of radiation sensors, micro-electro-mechanical systems and many other technological platforms. The continuous and coordinated relationship between the units of the Center is reflected in the wide production of scientific publications.


Monolithically integrated SiON photonic circuit and silicon single-photon detectors for NIR-range operation

Fabio Acerbi; Martino Bernard; Bernhard Goll; Alberto Gola; Horst Zimmermann; Georg Pucker; Mher Ghulinyan

Published in Journal of Lightwave Technology (

doi: 10.1109/JLT.2023.3342031


Nowdays, integrating quantum functionalities into photonic integrated circuits (PICs) is attracting considerable attention. A major breakthrough would involve the monolithic integration on a compact CMOS-compatible silicon chip that simultaneously handles the generation, processing and detection of single photons. This paper presents a solution to integrate monolithically photonic architectures with photon detectors on the same fully CMOS compatible chip.


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