Michele Crivellari
- Ricercatore MNF | Micro Nano Facility
Biography
Michele Crivellari is a researcher and cleanroom process engineer at the Micro-Nano Characterisation and Fabrication Facility (MNF), where he has been working since February 2001.
His work focuses on micro- and nanofabrication process development, MEMS sensor engineering and fabrication, and the development of advanced microsystems and semiconductor devices. He is responsible for physical vapour deposition (PVD) and wafer bonding activities within MNF and coordinates the MEMS fabrication area. His role combines technical expertise in fabrication processes with the coordination of cleanroom activities and the development and optimisation of microfabrication technologies.
His research activities include the development of flow and gas sensors, microfluidic systems, and devices based on the integration of different materials. He has also contributed to national and international research projects involving advanced materials and microsystems for a range of scientific and technological applications.
Expertise
- Micro- and nanofabrication of MEMS and semiconductor devices
- Layout design for MEMS and microfabricated devices
- Cleanroom process development and optimization
- Physical vapour deposition (PVD) and thin-film technologies
- Wafer bonding and heterogeneous integration
- Engineering and fabrication of flow and gas sensors
- Microfluidic systems and microsystem integration
- Materials and device characterisation
- Coordination of cleanroom activities and fabrication processes