PMSSG | Project Management, Strategy and Support

Deph profiling and quantification of chlorine and nitrogen in oxynitrides obtained by HTO process; Bersani, Massimo; M., Sbetti; Giubertoni, Damiano; Barozzi, Mario; Iacob, Erica; 2000

Characterisation of nitrided silicon-silicon dioxide interfaces; M. L., Polignano; M., Alessandri; D., Brazzeli; B., Crivelli; G., Ghidini; R., Zonca; Bersani, Massimo; Vanzetti, Lia Emanuela; M., Sbetti; C. G., Xing; G. E., Miner; N., Astici; S., Kupparo; D., Lopes; 2000

Boron-interstitial silicon cluster and their effects on transient enhanced diffusion of boron in silicon; S., Solmi; Bersani, Massimo; M., Sbetti; J., Lundsgaard Hansen; A., Nylandsted larsen; 2000

Boron-interstitial silicon clusters and their effects on transient enhanced diffusion of boron in silicon; Solmi, S; Bersani, Massimo; Sbetti, M; Lundsgaard Hansen, J; Nylandsted Larsen, A; JOURNAL OF APPLIED PHYSICS; Vol. 88>; N. 44547; 2000; pp. 4547-4552

Applicazioni della spettrometria di massa a materiali e tecniche di ultima generazione; Bersani, Massimo; M., Sbetti; Lazzeri, Paolo; Giubertoni, Damiano; Barozzi, Mario; Iacob, Erica; Vanzetti, Lia Emanuela; Anderle, Mariano; 2000

Which Colour?; Bersani, Massimo; Canteri, Roberto; M., Sbetti; Vanzetti, Lia Emanuela; Anderle, Mariano; 1999

Characterization of rapid Thermal Processing Oxynitrides by SIMS and XPS Analyses; Bersani, Massimo; Vanzetti, Lia Emanuela; M., Sbetti; Anderle, Mariano; 1999; pp. 144-145

ULSI Technology and Materials: Quantitative Answers by Combined Mass Spectrometry Surface Techniques; Bersani, Massimo; Fedrizzi, Michele; M., Sbetti; Anderle, Mariano; 1998; pp. 892-896

Technical report ITC-irst/SGS-Thomsn; M., Sbetti; Bersani, Massimo; 1998

Surface analytical techniques for last generation ULSI microelectronic materials and processing; Bersani, Massimo; 1998

Surface Analysis Studies of Bidri Archaeomaterials from the Collection of the British Museum; E., Paparazzo; L., Moretto; Bersani, Massimo; Fedrizzi, Michele; Anderle, Mariano; 1998

Quantitative SIMS Depth Distribution of Nitrogen in Nitrided Oxide at the SiO2/Si Interface; Bersani, Massimo; Fedrizzi, Michele; G., Ferroni; C., Savoia; Anderle, Mariano; 1998

PMSSG | Project Management, Strategy and Support

Head of Unit

Publications