Microsystems Technology | MST

Miniaturization-led advances in conventional micro/nanoelectronics have revolutionized digital technologies that have served well the needs of almost every socio-economic sector. Yet, as revolutionary as these advances have been, the miniaturization route alone appears now to be insufficient, as several emerging applications demand new sensing / actuation functionalities, embedded intelligence and computational features. The concept of “extreme edge” in sensors is a glaring example where computing capabilities are needed, but conventional technology cannot be used alone.

In this context, the activity of the MicroSystems Technology (MST) research unit, historically focused on the realization of microfabricated devices (MEMS) and sensors for research and industry in applications in the biomedical, environmental, space and telecommunications sectors, also explores research areas complementary to those of sensors, such as IoT, AI and machine learning, of current interest and capable of unquestionably bringing added value to microsystems and sensor technology.

The research activities of MST are extraordinarily broad. MST pursue a number of technologies that explore new materials and structures, new microfabrication techniques, new devices, and new system architectures that advance the state of the art. MST’s activities encompass integrated devices and systems, micro-electromechanical system (MEMS), radio-frequency MEMS (RF-MEMS), bio-MEMS, sensors, actuators, to name just a few.  The range of materials reaches well beyond Si and SiC to include other polymers, glass and many others.

The goal is to lead microsystems towards trajectories of growing Technology Readiness Level (TRL), where the expertise present within the MST unit can find a further impact.