Microsystems Technology | MST

The activity of the MicroSystems Technology (MST) Research Unit, historically focused on the realization of microfabricated devices (MEMS) and sensors for both research and industry in applications in the biomedical, environmental, space and telecommunications sectors, also explores research areas complementary to those of sensors, such as IoT, AI and machine learning – domains of growing interest and capable of unquestionably bringing added value to microsystems and sensor technology.

The research activities of MST are extraordinarily broad. MST pursues a number of technologies that explore new materials and structures, advanced microfabrication techniques, innovative device concepts, and system-level architectures that push the boundaries of current state of the art. MST’s activities encompass integrated devices and systems, micro-electromechanical system (MEMS), radio-frequency MEMS (RF-MEMS), bio-MEMS, sensors, actuators, to name just a few. The range of materials reaches well beyond Si and SiC to include polymers, glass and other advanced materials tailored to specific application needs.

While miniaturization-led advances in conventional micro/nanoelectronics have revolutionized digital technologies across nearly all socio-economic sectors, this approach alone is no longer sufficient to meet the needs of emerging applications. These require new sensing and actuation functionalities, embedded intelligence, and integrated computational features. The concept of “extreme edge” in sensors is a glaring example where computing capabilities are needed, but conventional technology cannot be used alone.

MST’s goal is to lead microsystems towards trajectories of growing Technology Readiness Level (TRL), where the multidisciplinary expertise present within the MST unit can find a further impact and bridge the gap between fundamental research and real-world applications.