Fabrication and optical characterization, of 2-dimensional Si3N4 waveguides; Pucker, Georg; Crivellari, Michele; Bellutti, Pierluigi; A., Lui; N., Daldosso; S., Cella; M., Girardini; V. G., Prakash; L., Pavesi; 2003 Conference on Lasers and Electro-Optics Europe (CLEO Europe 2003) (06/27/2003 to 06/27/2003, Munich, Germany); 2003